1 寮曡█
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2 涓昏醬緋葷粺
楂樼簿搴﹀姞宸ユ満搴婄殑涓昏醬鍦ㄥ姞宸ヨ繃紼嬩腑鐩存帴鏀寔宸ヤ歡鎴栧垁鍏風殑榪愬姩錛屾晠涓昏醬鐨勫洖杞簿搴︾洿鎺ュ獎鍝嶅埌宸ヤ歡鐨勫姞宸ョ簿搴︺�傚洜姝ゅ彲浠ヨ涓昏醬鏄珮綺懼害鍔犲伐鏈哄簥涓噸瑕佺殑涓�涓儴浠訛紝閫氳繃鏈哄簥涓昏醬鐨勭簿搴﹀拰鐗規(guī)�у彲浠ヨ瘎浠鋒満搴婃湰韜殑綺懼害銆傜洰鍓嶇爺鍒跺紑鍙戠殑楂樼簿搴﹀姞宸ユ満搴婄殑涓昏醬涓簿搴︽槸闈欏帇絀烘皵杞存壙涓昏醬(紓佹?zhèn)瑡巩栳u鎵夸富杞翠篃瓚婃潵瓚婂彈鍒頒漢浠殑閲嶈錛屽叾綺懼害鍦ㄨ繀閫熸彁楂?銆傜┖姘旇醬鎵夸富杞村叿鏈夎壇濂界殑鎸憜鍥炶漿綺懼害銆備富杞存尟鎽嗗洖杞簿搴︽槸闄ゅ幓杞寸殑鍦嗗害璇樊鍜屽姞宸ョ矖緋欏害褰卞搷涔嬪鐨勮醬蹇冪嚎鎸憜錛屽嵆闈為噸澶嶅緞鍚戞尟鎽嗭紝灞炰簬闈欐�佺簿搴︺�傜洰鍓嶉珮綺懼害絀烘皵杞存壙涓昏醬鍥炶漿綺懼害鍙揪0.05碌m錛岄珮鍙揪0.03碌m錛岀敱浜庤醬鎵夸腑鏀壙鍥炶漿杞寸殑鍘嬪姏鑶滅殑鍧囧寲浣滅敤錛岀┖姘旇醬鎵夸富杞磋兘澶熼珮浜庤醬鎵塊浂浠舵湰韜殑綺懼害銆備緥濡備富杞寸殑鍥炶漿綺懼害澶х害鍙互杈懼埌杞村拰杞村絳夎醬鎵塊儴浠跺渾搴︾殑1/15锝?/20銆傛棩鏈鑰呯爺絀惰〃鏄庯紝褰撹醬鍜岃醬濂楃殑鍦嗗害杈懼埌0.15锝?.2碌m鐨勭簿搴︽椂錛屽彲浠ュ埌10nm鐨勫洖杞簿搴︼紝騫墮�氳繃FFT嫻嬪畾鍏舵墍鍒墮�犵殑綺懼害絀烘皵杞存壙涓昏醬鐨勫洖杞簿搴︿負8nm銆侶CM-鈪犻珮綺懼害鍔犲伐鏈哄簥鐨勭┖姘旇醬鎵夸富杞寸殑鍦嗗害璇樊鈮?.1碌m銆傚彟澶栵紝絀烘皵杞存壙涓昏醬榪樺叿鏈夊姩鐗規(guī)�ц壇濂姐�佺簿搴﹀鍛介暱銆佷笉浜х敓鎸姩銆佸垰鎬?杞借嵎閲忓叿鏈変笌浣跨敤鏉′歡鐩哥О鐨勫�肩瓑浼樼偣銆備絾鏄湪涓昏醬鍒氬害銆佸彂鐑噺涓庣淮鎶ょ瓑鏂歸潰闇�瑕佸仛緇嗚嚧鐨勫伐浣溿�傝鍋氬埌綰崇背綰у洖杞簿搴︾殑絀烘皵杞存壙涓昏醬錛岄櫎絀烘皵杞存壙鐨勮醬鍙婅醬濂楃殑褰㈢姸綺懼害杈懼埌0.15锝?.2碌m錛屽啀閫氳繃絀烘皵鑶滅殑鍧囧寲浣滅敤鏉ュ疄鐜板錛岃繕闇�瑕佷繚鎸佷緵姘斿瓟嫻佸嚭姘斾綋鐨勫潎鍖�鎬с�備緵姘斿瓟鏁伴噺銆佸垎甯冪簿搴︺�佸杞村績鐨勫�捐銆佽醬鎵跨殑鍑稿嚬銆佸渾鏌卞害銆佽〃闈㈢矖緋欏害絳夌殑涓嶅悓錛屽潎浼氬獎鍝嶈醬鎵塊潰絀烘皵嫻佸姩鐨勫潎鍖�鎬с�傝�屾皵嫻佺殑涓嶅潎鍖�鏄駭鐢熷井灝忔尟鍔ㄧ殑鐩存帴鍘熷洜錛屼粠鑰屽獎鍝嶅洖杞簿搴︺�傝鏀瑰杽渚涙皵緋葷粺鐨勭姸鍐碉紝杞存壙鏉愭枡瀹滈�夌敤澶氬瓟璐ㄦ潗鏂欍�傝繖鏄洜涓哄瀛旇川杞存壙鏄�氳繃鏃犳暟灝忓瓟渚涙皵鐨勶紝鑳藉鏀瑰杽鍘嬪姏鍒嗗竷錛屽湪鎻愰珮鎵胯澆鑳藉姏鐨勫悓鏃訛紝鏀瑰杽絀烘皵嫻佸姩鐨勫潎鍖�鎬с�傚瀛旇川鏉愭枡鐨勫潎鍖�鎬ф槸寰堥噸瑕佺殑銆傚洜涓哄瀛旇川渚涙皵杞存壙鏉愭枡鍐呴儴鐨勭┖媧炰細褰㈡垚姘旇厰錛屽涓嶅姞浠ユ帶鍒朵細寮曡搗姘旈敜鎸姩錛屼負姝ら』瀵硅〃闈㈣繘琛屽牭濉炲姞宸ャ�?/span>
3 鐩寸嚎瀵艱建
浣滀負鍒�鍏峰拰宸ヤ歡鐩稿瀹氫綅鏈烘瀯鐨勭洿綰垮杞紝鏄粎嬈′簬涓昏醬鐨勯噸瑕侀儴浠躲�傚楂樼簿搴﹀姞宸ユ満搴婄殑鐩寸嚎瀵艱建鐨勫熀鏈姹傛槸錛氬姩浣滅伒媧匯�佹棤鐖絳夎繛緇姩浣滐紱鐩寸嚎綺懼害濂斤紱鍦ㄥ疄鐢ㄤ腑搴斿叿鏈変笌浣跨敤鏉′歡鐩擱�傚簲鐨勫垰鎬э紱楂橀�熻繍鍔ㄦ椂鍙戠儹閲忓皯錛涚淮淇繚鍏誨鏄撱�傞珮綺懼害鍔犲伐鏈哄簥涓殑甯哥敤瀵艱建鏈塚-V鍨嬫粦鍔ㄥ杞ㄥ拰婊氬姩瀵艱建銆佹恫浣撻潤鍘嬪杞ㄥ拰姘斾綋闈欏帇瀵艱建銆備紶緇熺殑V-V鍨嬫粦鍔ㄥ杞ㄥ拰婊氬姩瀵艱建鍦ㄧ編鍥藉拰寰峰浗鐨勫簲鐢ㄩ兘鍙栧緱浜嗚壇濂界殑鏁堟灉銆傚悗涓ょ閮藉睘浜庨潪鎺ヨЕ寮忓杞紝鎵�浠ュ畬鍏ㄤ笉蹇呮媴蹇冪埇琛岀殑浜х敓銆備粠綺懼害鏂歸潰鏉ヨ�冭檻鍚庝袱縐嶄篃鏄�傚疁鐨勫杞ㄣ�傛恫浣撻潤鍘嬪杞ㄧ敱浜庢補鐨勭矘鎬у壀鍒囬樆鍔涜�屽彂鐑噺姣旇緝澶э紝鍥犳欏誨娑插帇娌歸噰鍙栧喎鍗存帾鏂姐�傚彟澶栨恫鍘嬭緗瘮杈冨ぇ錛岃�屼笖娌硅礬鐨勭淮淇繚鍏諱篃楹葷儲銆傛皵浣撻潤鍘嬪杞ㄧ敱浜庢敮鎵塊儴鏄鉤闈紝鍙幏寰楄緝澶х殑鏀壙鍒氬害錛屽畠鍑犱箮涓嶅瓨鍦ㄥ彂鐑棶棰橈紝濡傛灉璁捐鍚堢悊錛屽垯鍦ㄥ悗緇殑緇翠慨淇濆吇鏂歸潰鍑犱箮涓嶄細鍙戠敓浠�涔堥棶棰樸�備絾欏繪敞鎰忓杞ㄩ潰鐨勯槻灝樸�傜┖姘斿杞ㄧ殑闂撮殭浠呬負鍗佸嚑寰背錛岃�屽濡傛澶у皬鐨勫皹鍩冭倝鐪兼槸鐪嬩笉鍒扮殑錛岃繖鏍風殑灝樺焹鍗充嬌鏄磥鍑�瀹や篃涓嶈兘瀹屽叏娑堥櫎錛屽皹鍩冭惤鍏ョ┖姘斿杞ㄩ潰鍐呬細寮曡搗瀵艱建闈㈢殑鎹熶激銆傛�諱綋鐪嬫潵錛岀┖姘旈潤鍘嬪杞ㄦ槸鐩墠綺懼害楂樼殑瀵艱建錛屼絾鑻ヤ笉鑳戒繚璇侀槻灝樻潯浠訛紝鍒欓』鏀圭敤娑蹭綋闈欏帇瀵艱建銆傜洰鍓嶇┖姘旈潤鍘嬬洿綰垮杞ㄧ殑鐩寸嚎搴﹀彲杈?.1锝?.2碌m/250mm銆?/span>
閫氳繃瀹夎璋冩暣絀烘皵闈欏帇瀵艱建寰楀嚭濡備笅緇撹錛?1)欏諱繚璇佽凍澶熺殑鎺掓皵閫氶亾錛屽惁鍒欐簻鏉垮皢浜х敓浣嶇疆鎵板姩錛屾壈鍔ㄩ噺鏈夋椂杈炬暟寰背銆?2)浠庣悊璁轟笂璁插噺灝忚妭嫻佸瓟寰勫拰姘旇啘鍘氬害錛屽彲浠ユ彁楂樻簻鏉垮垰搴︼紝浣嗗甫鏉ュ伐鑹轟笂鐨勫洶闅俱�傜敤浼犵粺鏈烘鍔犲伐鎵嬫寰堥毦鍔犲伐鍑猴紲f0.15mm鐨勫皬瀛旓紝闇�鎺㈡眰鍏跺畠鍔犲伐鎵嬫錛屼篃瀵歸槻姝㈠皬瀛斿牭濉炴彁鍑轟簡鏇撮珮鐨勮姹傘�?3)T鍨嬪杞ㄧ殑渚ф皵嫻潡鍜屼笅姘旀誕鍧楀潎鐢辮灪閽夌揣鍥猴紝褰㈡垚鎮(zhèn)噦緇撴瀯錛屽綋鐢ㄨ灪閽夌揣鍥哄拰鏈夌┖姘斿帇鍔涗綔鐢ㄦ椂錛屾湁鍙兘浜х敓鍙樺艦錛屼嬌姘旇啘鍘氬害涓嶅潎鍖�浠ヨ嚧浜庡獎鍝嶅叾鎬ц兘銆備絾緇忚繃璁＄畻璇佹槑錛屼嬌鐢ㄩ暱铻洪拤鏃訛紝姘旀誕鍧楀拰铻洪拤鍙樺艦鍧囩◢澶э紱浣跨敤鐭灪閽夋椂錛屾皵嫻潡鍜岃灪閽夌殑鍙樺艦閮藉湪浜氬井綾崇駭錛屽彲蹇界暐涓嶈銆?/span>
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